Guidelines for Proceedings Manuscripts for
the Symposium of Ultra-Clean Processing on Semiconductor Surfaces
Authors interested in submitting an abstract for UCPSS 2025 are kindly requested to follow the submission guidelines provided on this website.
For any inquiries regarding abstract submission or publication, please contact the publisher directly. To prevent spam, we recommend using the contact form provided below:
Kindly ensure that you clearly mention the name of the conference in your message so that your inquiry can be directed appropriately.
Keywords:
Language, figures, pictures, tables, equations, references, publication ethics
Introduction
The proceedings of UCPSS will be published by Trans Tech Publications Ltd in full text as a volume of the journal (Solid State phenomenon) on www.scientific.net.
This document explains how to prepare your proceedings manuscript. Strictly follow the guidelines explained below and use the accompanying manuscript template.
All text must be in black/white only. Color figures or photographs should also reproduce well in black and white. Check your article by printing a hardcopy on a high-quality printer in black/white mode. Please keep this in mind when designing your figures, tables or other artwork etc… The Publisher calls authors for ethical behaviour (according to the Committee on Publication Ethics): Publishing Ethics | Scientific.Net Once your manuscript is ready it should be uploaded to the UCPSS (Ultraclean Processing of Semiconductor Surfaces) conference at latest on June 20th.
TransTechPub. will send you (corresponding author) the login instructions and details for your account. After your submission, the peer-review procedure of your manuscript will be organized through the journal interface.
Language
All manuscripts must be in English. Proof check the English language by dedicated software tools (e.g. Grammarly..) and by proofreading by a native speaker.
Overall format aspects
The title should not contain trade-names nor acronyms. The length of the manuscript should typically be 6 pages. There is no real page limit.
Authors
Author lists should preferably be limited to a maximum of 7 authors. All authors should have a significant contribution to the manuscript. If the list contains more than 7 authors an accompanying letter should be sent to clearly identify the contribution of each author individually.
References
A proper description of the background or earlier work and prior art is mandatory. Each Manuscript should at least refer to 6 references. The overview of proceedings of previous editions of UCPSS, on the website. https://www.ucpss.org , could be a useful starting point.
General typesetting rules
Units
Use SI-units for all physical quantities (e.g. m, kg, s, N, C, A, V, K, J, eV, Pa, bar, …) . Use of other regional or outdated units is not acceptable (e.g. torr, psi, inch, ft, US-gallon, UK-gallon, cal, btu, pk, hp.…) but may optionally be added between brackets, if (still used). E.g. overpressure, pg = 1 bar (=approx. 14 psi).
Equations
Equations (refer with: Eq. 1, Eq. 2,…) should be indented 5 mm (= approx. 0.2 inch), with enough space above and below to separate the equation clearly from the running text. Equations have to be numbered sequentially, with the equation number put in parentheses and flushed to the right (see Eq. 1).

A detailed overview of the typographic rules regarding symbols and equations can be found in instructions and guidelines for authors of scientific journal contributions (e.g. the American Institute of Physics (AIP) Style Manual). This implies the following:
For text-like items use (non-italic)roman typeface, more specifically for:
- Subscripts representing clarifying text or text abbreviations (e.g haverage , Cg, with “g” from “gas”)
- Standard mathematical functions (e.g. sin, exp,…) and chemical symbols (e.g. Au, Ni,…)
- (fixed) values, units (standard units such as m, kg, Hz, C, A and imaginary units such as i, j)
For variables use single italic letters: such as symbols for mathematical quantities (x,y,z), symbols for physical quantities (e.g. A, v, T, Cg, with “C” from “Concentration”), mathematical functions f(x), and indices representing symbols of physical quantities (e.g. Ga1-xAlxAs):
- The use of this proper standardized style improves communication accuracy: it allows for clear discrimination between e.g. a variable A (for area) and the unit A (for ampere) or the variable T (for temperature) and the unit T (for tesla).
Tables or figures
- Tables or figures (floating items) can be placed at the most relevant place in the text (i.e. where they are first referred to) or grouped together at the end of the manuscript. In the former case, they should be positioned distinctly from the running text, e.g. by adding empty space above or below the item.
- Adding captions. Tables and figures should be accompanied by a numbered, self explaining caption. In MS Word, this can be achieved using “insert – caption” from the menu bar and by selecting the appropriate floating item (table or figure). Cross references to tables and figures can be inserted by selecting “insert – cross reference” from the menu bar and by selecting the appropriate floating item from the list. In this way, numbering of the floating items and the corresponding cross references is done automatically. The font for captions is 10pt Times New Roman.
Tables
- Tables (referred to with: Table I,…) contain one or more header lines, describing the table contents. Units should be given in standard brackets (meV).
- The table caption (with the table number in roman capital numbers) should be placed above or beside the table. Horizontal lines are used to separate the caption from the table header and from the contents, or to delineate larger table portions. Individual lines of a table should not be separated (see e.g. Table I).
Figures
- In the case of figures (referred to with: Figure 1,…) the caption, containing the figure number, should be placed below or beside the figure. Please include figures as graphic images in the electronic version.
- For mathematical plots, no line-frame (so-called box) should be put around the figure and no gridlines should be used inside the graph area. It is highly recommended, however, to use x/y mirror axes with appropriate major and minor ticks. The font of the labels should be chosen – large enough – such that they are clearly readable. To distinguish different traces or curves from each other one should use an appropriate combination of marker types, line styles hashing patterns, instead of colors or grey scales (see e.g. Figure 1 and Figure 2). For line traces, an appropriate line thickness must be chosen. The background should be white, implying that all background color or grey should be removed.
Literature References
- References are cited in the text by square brackets [1]. Two or more references at a time should be put in one set of brackets [2,3]. The references must be numbered in the order in which they are cited in the text and are to be listed at the end of the contribution under a heading References, see our example below. The references are printed in a 10pt Times New Roman font.
Submission – MS Word file
- The manuscript should be saved in a MS Word format or a PDF document and submitted via the Manuscript submission module that can be accessed via the conference website www.ucpss.org. Deadline for submission is June 20th 2025. Manuscripts cannot be submitted by sending by email.
References
[1] J. van der Geer, J.A.J. Hanraads, R.A. Lupton, The art of writing a scientific article, J. Sci. Commun. 163 (2000) 51-59.
[2] K. Wostyn et al., Sol.State.Phenom, 195 (2013), p 293; https://doi.org/10.4028/www.scientific.net/SSP.195.293
[3] W. Strunk Jr., E.B. White, The Elements of Style, third ed., Macmillan, New York, 1979.

Figure 1: Area concentration of residual surface contamination after two spin cleaning processes.
Table I: Overview of W0 (sr) for SiO2 particles using oblique illumination in combination with the wide and narrow detectors of the particle measurement tool.

Figure 2: Area concentration of residual Es-contamination on the surface as a function of Es mass fraction and pH of the cleaning liquid, for two cleaning techniques.